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The TSEM consists of equipment characteristics and behaviors that apply to this class of equipment
SEMI F104-0312 (technical revision)
including handling and packaging
• Carrier transfer between automated material handling system (AMHS) vehicles and production equipment load ports
–工廠委員會之技術認可，同時也是日本平面顯示器工廠自動化委員會的直接責任。目前之版本是在2004年11月24日，由日本區標準委員會所認可。最初可在2005年1月的網址www
M01700 - SEMI M17 - 一般的なウェーハグリッドのガイド StdPbc-1125 The TSEM consists of equipmentglobal Silicon Wafer Committee2010827 global Audits & Reviews Subcommittee201010www. semi. org199020047 SEMI M62 Referenced SEMI Standards SEMI M1 Specifications for Polished Single Crystal Silicon Wafers SEMI M59 Terminology for Silicon Technology SEMI M62 Specifications for Silicon Epitaxial Wafers SEMI MF154 Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces SEMI MF1725 Practice for Analysis of